Liquid Flow Meter based on a Thermal Anemometer Microsensor


Ural Federal University, Lenin av. 51, Ekaterinburg, 620000 Russia


An analytical model of a thermal anemometer sensor is developed. A thermal anemometer microsensor utilizing doped polycrystalline silicon is created. A liquid flow meter prototype based on a thermal anemometer microsensor is designed. Results of the flow meter testing are presented.